(Invited) MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology
(Invited) MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology
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(特邀)金多层金属技术制造的MEMS加速度计
DOI：
10.1149/09204.0169ecst
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发表时间：
2019
期刊：
影响因子：
--
通讯作者：
K. Masu
中科院分区：
文献类型：
--
作者：
K. Machida;D. Yamane;T. Konishi;S. Iida;N. Ishihara;T. Chang;M. Sone;Hiroyuki Ito;K. Masu
本文综述了我们提出的MEMS（微机电系统）加速度计的特点及其可靠性问题。为了实现微G（1G = 9.8m/s2）级的传感，我们提出了一种采用多层金属技术的金质量块电容式MEMS加速度计。利用金作为检测质量块的高密度材料降低了影响MEMS加速度计分辨率的关键因素--布朗噪声。结果，尽管金检验质量块的尺寸与硅检验质量块的尺寸相同，但我们可以获得22 nG/kHz的低值。关于可靠性，进行了热循环和振动循环试验。实验结果表明，MEMS加速度计具有实用潜力。总之，我们确认，我们提出的MEMS加速度计可以作出贡献，一个新的技术发展。
This paper reviews the feature of our proposed MEMS (microelectromechanical systems) accelerometer and the issue of its reliability. In order to realize micro-G (1 G= 9.8 m/s2) level sensing, we have proposed capacitive MEMS accelerometers with gold proof mass using the multi-layer metal technology. Utilizing gold as a high density material of the proof mass reduces the Brownian noise (BN), which is a crucial factor to determine the resolution of MEMS accelerometer. As a result, we can obtain the low value of 22 nG/√ Hz despite the same size of gold proof mass as silicon proof mass. Regarding the reliability, the heat cycle and the vibration cycle tests are conducted. The experimental results suggest that the MEMS accelerometer has potential for a practical use. In conclusion, we confirm that our proposed MEMS accelerometer can make a contribution to a new technical development.