A probe-positioning method with two-dimensional calibration pattern for micro-multi-point probes
A probe-positioning method with two-dimensional calibration pattern for micro-multi-point probes
复制标题
一种微多点探针二维标定图的探针定位方法
DOI：
10.1063/1.1569390
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发表时间：
2003
影响因子：
1.6
通讯作者：
K. Miki
中科院分区：
文献类型：
--
作者：
W. Yashiro;I. Shiraki;K. Miki
提出了一种可独立驱动的微多点探针定位方法。通过电子束光刻技术，我们制作了一个0.5 mm×0.5 mm大小的探针定位模式矩阵，该矩阵由750个nm×750 nm大小的单元组成。每个单元有150个nm×150纳米大小的凹坑，这些凹坑代表一个位数组，它指定了它的地址。用微探针读取图案上的地址信息，不仅可以确定探针的位置，还可以校准每次扫描的方向和尺寸。
A probe-positioning method for micro-multi-point probes that can be independently driven is proposed. By the electron-beam lithography technique, we fabricated a 0.5 mm×0.5 mm-sized probe-positioning pattern matrix consisting of 750 nm×750 nm-sized cells. Each cell has 150 nm×150 nm-sized pits that represent a bit array, which specifies its address. Reading the address information on the pattern with the microprobes allowed us not only to determine the probe positions, but also to calibrate the orientation and dimension of each scan.