Method of room temperature covalent bonding
Method of room temperature covalent bonding
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室温共价键合方法
DOI：
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发表时间：
2004
期刊：
影响因子：
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通讯作者：
童勤义
中科院分区：
文献类型：
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作者：
童勤义
一种键合方法，包括使用具有氟化氧化物的键合层。氟可以通过暴露于含氟溶液、蒸气或气体或通过注入引入键合层。还可以使用在其形成过程中将氟引入层中的方法形成键合层。所述键合层的表面端接所需的物质，优选为NH2物质。这可以通过将键合层暴露于NH4OH溶液来实现。在室温下获得较高的结合强度。该方法还可包括将两个键合层键合在一起，并在键合层之间的界面附近产生具有峰的氟分布。其中一个键合层可以包括彼此形成的两个氧化层。氟浓度在两氧化层之间的界面处也可能有第二个峰。
A method of bonding includes using a bonding layer having a fluorinated oxide. Fluorine may be introduced into the bonding layer by exposure to a fluorine-containing solution, vapor or gas or by implantation. The bonding layer may also be formed using a method where fluorine is introduced into the layer during its formation. The surface of the bonding layer is terminated with a desired species, preferably an NH2 species. This may be accomplished by exposing the bonding layer to an NH4OH solution. High bonding strength is obtained at room temperature. The method may also include bonding two bonding layers together and creating a fluorine distribution having a peak in the vicinity of the interface between the bonding layers. One of the bonding layers may include two oxide layers formed on each other. The fluorine concentration may also have a second peak at the interface between the two oxide layers.