Constant time interval production planning with application to WIP control in semiconductor fabrication
Constant time interval production planning with application to WIP control in semiconductor fabrication
复制标题
恒定时间间隔生产计划及其在半导体制造中 WIP 控制中的应用
DOI：
10.1109/wsc.2003.1261569
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
Hirofumi Matsuo
中科院分区：
文献类型：
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作者：
K. Miyashita;Kazuyuki Senoh;Hiroyuki Ozaki;Hirofumi Matsuo
我们开发了一个恒定的时间间隔的生产计划和控制方法，称为CONSTIN，及其相关的模拟系统的大规模和不稳定的半导体制造过程。CONSTIN仅以固定的时间间隔在工序之间移动在制品库存，从而保持期望的库存水平。我们的理论和实验分析表明，在CONSTIN中的时间间隔与时间间隔之间存在明显的关系。与现实的晶圆制造工艺数据的计算实验表明，CONSTIN是一个流行的事件驱动的模拟器的模拟精度相媲美，可以运行得更快。附加的实验也表明，通过适当的控制规则，CONSTIN可以从极端偏差中恢复所需的水平，并保持它们。因此，我们得出结论，CONSTIN是一个很有前途的方法，生产计划和半导体制造过程的生产控制。
We develop a constant time interval production planning and control methodology, called CONSTIN, and its associated simulation system for a large-scale and unstable semiconductor manufacturing process. CONSTIN moves work-in-process inventories (WIP) between processes only at a constant time interval, and consequently maintains a desirable level of WIP. Our theoretical and experimental analysis shows a clear relationship between WIP levels and the time interval in CONSTIN. Computational experiments with realistic wafer fabrication process data demonstrate that CONSTIN is comparable in simulation accuracy to a popular event-driven simulator and can run much faster. Additional experiments also manifest that, with appropriate control rules, CONSTIN can restore the desired levels of WIP from extreme deviations and maintain them. Therefore, we conclude that CONSTIN is a promising methodology of production planning and WIP control for the semiconductor manufacturing process.