Performance optimization of SnO2:F thin films under quasi-vacuum laser annealing with covering a transparent PET sheet: A study using processing map
Performance optimization of SnO2:F thin films under quasi-vacuum laser annealing with covering a transparent PET sheet: A study using processing map
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覆盖透明 PET 片的准真空激光退火下 SnO2:F 薄膜的性能优化：使用加工图的研究
DOI：
10.1016/j.apsusc.2020.145334
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发表时间：
2020-04-15
影响因子：
6.7
通讯作者：
Ren, Nai-fei
中科院分区：
文献类型：
--
作者：
Li, Bao-jia;Yang, Guang-yu;Ren, Nai-fei
本文提出了一种简单有效的准真空激光退火方法，用于优化SnO2:F （FTO）薄膜的光电性能。该方法利用透明的聚对苯二甲酸乙二醇酯（PET）片材在薄膜表面形成准真空环境，有利于抑制激光能量的快速损失，从而增强激光退火效果。研究发现，PET辅助激光退火效果与不同激光脉冲能量和离焦量对PET片材的转变密切相关，从而导致FTO膜的表面形貌特征不同。只有将预生成的PET炭化残留物完全灰化，避免激光烧蚀FTO层，才能达到理想的激光退火效果。根据建立的工艺图，确定pet辅助激光退火FTO薄膜的最佳激光脉冲能量为90 μ J，离焦量为0.6 mm。得到的FTO薄膜综合性能最佳，平均可见光透过率最高为84.5%，片阻最低为6.8 ω /sq，优值最高为2.73 × 10(-2) ω(-1)，表明pet辅助激光退火具有突出的应用优势。
This work presents a simple and efficient quasi-vacuum laser annealing method for photoelectric performance optimization of SnO2:F (FTO) films. This method uses a transparent polyethylene terephthalate (PET) sheet to form a quasi-vacuum environment on the film surface, which was conducive to restraining the rapid loss of laser energy and thus reinforcing the laser annealing effect. It was found that the PET-assisted laser annealing effect was closely related to the transformation of the PET sheet caused by using different laser pulse energies and defocusing amounts, and thus resulted in different surface morphology features of the FTO films. The ideal laser annealing effect could be achieved only through entirely ashing the pregenerated PET carbonized residues and avoiding laser ablation of the FTO layer. Based on the established processing map, the optimal laser pulse energy and defocusing amount for PET-assisted laser annealing of the FTO films were determined to be 90 mu J and 0.6 mm, respectively. The as-obtained FTO film was confirmed to have the best overall performance with the highest average visible transmittance of 84.5%, the lowest sheet resistance of 6.8 Omega/sq and the highest figure of merit of 2.73 x 10(-2) Omega(-1), indicating the prominent application superiority of PET-assisted laser annealing.