3D microfabrication by applying the laser-induced bubble method to the thermoset polymer PDMS using a conventional nanosecond laser.
3D microfabrication by applying the laser-induced bubble method to the thermoset polymer PDMS using a conventional nanosecond laser.
复制标题
使用传统纳秒激光将激光诱导气泡法应用于热固性聚合物 PDMS 进行 3D 微加工。
DOI：
10.1364/ol.477649
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发表时间：
2022
期刊：
影响因子：
3.6
通讯作者：
Y. Hanada
中科院分区：
文献类型：
--
作者：
Yoichi Toba;Y. Hanada
我们最近开发了一种微加工技术，并将其应用于热固性聚合物聚二甲基硅氧烷（PDMS）。该技术能够在PDMS衬底上快速制造微通道，并通过随后的电镀对通道进行选择性金属化；然而，该技术仅限于表面微加工。因此，我们探索了利用纳秒激光对PDMS进行三维（3D）微flib的可行性。在实验中，将激光束聚焦在预固化液体PDMS内，并在垂直和平行于激光束轴线的方向上进行扫描，以产生激光诱导气泡的三维线。在microFLIB处理过程中，所产生的气泡的形状在预固化PDMS中保留了24小时以上；因此，垂直激光扫描产生的气泡线在随后的热固化后成功地在PDMS衬底内部产生了三维中空横向微通道。此外，通过平行激光扫描，可以很容易地在PDMS衬底上制造出宽高比大于~ 200的通孔。三维微流控装置的制造包括两个开放的储存器在PDMS衬底也演示了生物芯片的应用。
We recently developed a microfabrication technique [microfabrication using laser-induced bubble (microFLIB)] and applied it to polydimethylsiloxane (PDMS), a thermoset polymer. The technique enabled the rapid fabrication of a microchannel on a PDMS substrate and selective metallization of the channel via subsequent plating; however, the technique was limited to surface microfabrication. Therefore, we explored the feasibility of three-dimensional (3D) microFLIB of PDMS using a nanosecond laser. In the experiment, a laser beam was focused inside pre-curing liquid PDMS and was scanned both perpendicular and parallel to the laser-beam axis to generate a 3D line of laser-induced bubbles. In the microFLIB processing, the shape of the created bubbles was retained in the pre-curing PDMS for more than 24 h; thus, the line of bubbles generated by the perpendicular laser scanning successfully produced a 3D hollow transverse microchannel inside the PDMS substrate after subsequent thermal curing. In addition, a through-hole with an aspect ratio greater than ∼200 was easily fabricated in the PDMS substrate by parallel laser scanning. The fabrication of a 3D microfluidic device comprising two open reservoirs in a PDMS substrate was also demonstrated for biochip applications.