Novel MEMS oscillator using in-plane disk resonator with sensing platform and its mass sensing characteristics
Novel MEMS oscillator using in-plane disk resonator with sensing platform and its mass sensing characteristics
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采用面内圆盘谐振器的新型MEMS振荡器及其传感平台及其质量传感特性
DOI：
10.1109/transducers.2011.5969670
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发表时间：
2011
期刊：
影响因子：
--
通讯作者：
Takashi Mihara
中科院分区：
文献类型：
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作者：
M. Konno;T. Ikehara;S. Murakami;R. Maeda;Mutsumi Kimura;T. Fukawa;Takashi Mihara
我们开发了一种新的圆盘谐振器，它具有高品质因数，高效的质量检测能力，和面积有效的布局。在结构设计中采用支点位置控制，使支承损失最小化，从而获得高品质因数。中心孔的传感平台提供了宽而高灵敏度的质量检测区域。我们还开发了一种使用阻抗变换电路的振荡电路，适用于具有高动态阻抗的MEMS谐振器。使用该振荡器演示了甲苯气体检测。
We developed a new disk resonator which has high quality factor, highly efficient mass detection ability, and area-effective layout. High quality factor was achieved by minimizing support loss using nodal-point position control on the structural design. Sensing platform in the center hole provides wide and high-sensitive mass detection area. We also developed an oscillation circuit using impedance transform circuit which is suitable to MEMS resonators with high motional impedance. Toluene gas detection was demonstrated using this oscillator.