Low speed piezoelectric optical microscanner actuated by piezoelectric microcantilevers using LaNiO3 buffered Pb(Zr, Ti)O3 thin film
Low speed piezoelectric optical microscanner actuated by piezoelectric microcantilevers using LaNiO3 buffered Pb(Zr, Ti)O3 thin film
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DOI：
10.1088/0964-1726/18/6/065008
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发表时间：
2009-06-01
影响因子：
4.1
通讯作者：
Itoh, T.
中科院分区：
文献类型：
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作者：
Kobayashi, T.;Maeda, R.;Itoh, T.
我们利用LaNiO_3(LNO)缓冲的PZT(PZT)薄膜，研制了适用于压电微悬臂梁驱动的低速扫描的压电光显微扫描仪。采用微机械系统(MEMS)微加工工艺，在绝缘体上硅(SOI)晶片上沉积了多层铂/LNO/PZT/LNO/铂/钛/二氧化硅多层膜，制成了微扫描仪。微悬臂梁也是通过相同的微加工工艺制造的。利用微悬臂梁，研究了微扫描仪的驱动条件。研究发现，在非共振交流激励下驱动的微扫描器需要施加直流偏置才能实现镜面旋转。在10V的直流偏压下，反射镜的旋转角度随交流驱动电压的增大而线性增加。在交流电压为20V-pp-30 Hz、直流偏置为10V的条件下，反射镜的机械半转角达到5.3度。
We have developed piezoelectric optical microscanners for low speed scanning actuated by piezoelectric microcantilevers using LaNiO3 (LNO) buffered Pb(Zr, Ti)O-3 (PZT) thin films. The microscanners were fabricated from multilayers of Pt/LNO/PZT/LNO/Pt/Ti/SiO2 deposited on silicon on insulator (SOI) wafers through a microelectromechanical system (MEMS) microfabrication process. The microcantilevers were also fabricated through the same microfabrication process. Using the microcantilevers, we investigated the actuation conditions for the microscanners. We found that the microscanners actuated under non-resonant AC actuation need DC bias application to realize the mirror rotation. Application of 10 V of DC bias resulted in a linear increase in the mirror rotation angle with the amplitude of the AC actuation voltage. The mechanical half rotation angle of the mirror reached 5.3 degrees under actuation by an AC voltage of 20 V-pp-30 Hz and a DC bias of 10 V.