Influence of methane flow on the microstructure and properties of TiAl‐doped a‐C:H films deposited by middle frequency reactive magnetron sputtering
Influence of methane flow on the microstructure and properties of TiAl‐doped a‐C:H films deposited by middle frequency reactive magnetron sputtering
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DOI：
10.1002/sia.3120
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发表时间：
2009-12
影响因子：
1.7
通讯作者：
Xianjuan Pang;Lei Shi;Peng Wang;Yanqiu Xia;Wei-min Liu
中科院分区：
文献类型：
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作者：
Xianjuan Pang;Lei Shi;Peng Wang;Yanqiu Xia;Wei-min Liu
采用中频磁控溅射TiAl靶，在氩气和甲烷混合气氛下，在Si衬底上制备了掺氢TiAl的a-C：H薄膜。利用原子力显微镜（AFM）、XPS、拉曼光谱和纳米压痕等手段对薄膜的表面形貌、硬度、化学性质和键型进行了表征。在UMT-2 MT试验系统上表征了沉积膜的摩擦磨损行为。利用扫描电镜对钢球在干摩擦条件下与沉积膜摩擦后的磨痕和磨屑进行了分析。沉积膜的磨损率是从使用光学轮廓在磨损轨迹上取得的表面轮廓的迹线计算的。结果表明，在60 sccm甲烷流量下沉积的薄膜具有较高的硬度，以及较低的摩擦系数和磨损率，这归因于石墨化转移层的形成。版权所有© 2009约翰威利父子有限公司。
Hydrogenated TiAl‐doped a‐C:H films were deposited on Si substrates by middle frequency magnetron sputtering TiAl target in argon and methane gas mixture atmosphere. The surface morphology, hardness, chemical nature and bond types of the films were characterized by means of atomic force microscopy (AFM), XPS, Raman spectroscopy and nanoindentation. The friction and wear behaviors of the deposited films were characterized on an UMT‐2MT test system. SEM was utilized to analyze the wear scar and debris on steel balls after sliding on the deposited films under dry friction conditions. The wear rate of the deposited films was calculated from traces of surface profiles taken across the wear track using an optical profile. The results demonstrated that the film deposited at 60 sccm methane flow exhibited higher hardness, as well as low friction coefficient and wear rate, which is attributed to the formation of a graphitized transfer layer. Copyright © 2009 John Wiley & Sons, Ltd.