The Line Speed Effect in Roll-to-Roll Dry Transfer of Chemical Vapor Deposition Graphene
The Line Speed Effect in Roll-to-Roll Dry Transfer of Chemical Vapor Deposition Graphene
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发表时间：
2021
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通讯作者：
N. Hong;D. Kireev;Qishen Zhao;Dongmei Chen;D. Akinwande;Wei Li
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作者：
N. Hong;D. Kireev;Qishen Zhao;Dongmei Chen;D. Akinwande;Wei Li
卷对卷(R2R)技术特别适合于将化学气相沉积(CVD)石墨烯转移到基于石墨烯的高速、低成本、可再生和环保的电子设备制造中，如柔性触摸屏、场效应晶体管和有机太阳能电池。最近开发了一种R2R石墨烯干法转移系统。单层石墨烯通过机械剥离从铜生长衬底转移到聚合物衬底上。在这项工作中，我们提出了一项实验研究，以考察线速度的机械剥离过程对转移石墨烯质量的影响。结果表明，线速度的影响不是单调的，在所研究的工艺条件中，存在一个最佳速度来获得最高和最稳定的转移石墨烯的导电率。这项研究提供了对工艺参数影响的理解，并展示了大规模CVD石墨烯的R2R干法转移工艺在工业上的潜力
A roll-to-roll (R2R) technique is especially desirable for transfer of chemical vapor deposition (CVD) graphene towards high-speed, low-cost, renewable, and environmentally friendly manufacturing of graphenebased electronic devices, such as flexible touchscreens, field effect transistors and organic solar cells. A R2R graphene dry transfer system is recently developed. Monolayer graphene is transferred from a copper growth substrate to a polymer backing layer by mechanical peeling. In this work, we present an experimental study to examine the effects of line speed of the mechanical peeling process on the transferred graphene quality. It is shown that the effect of line speed is not monotonic, and an optimal speed exists to yield the highest and most consistent electrical conductivity of transferred graphene among the process conditions studied. This study provides understanding of process parameter effects and demonstrates the potential of the R2R dry transfer process for large-scale CVD graphene toward industrial