Energetic neutral fluxes towards surfaces in a magnetically enhanced reactive ion etch-like reactor
Energetic neutral fluxes towards surfaces in a magnetically enhanced reactive ion etch-like reactor
复制标题
在磁增强反应离子蚀刻反应器中朝向表面的高能中性通量
DOI：
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发表时间：
2003
期刊：
影响因子：
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通讯作者：
R. Brinkmann
中科院分区：
文献类型：
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作者：
W. Sabisch;M. Kratzer;R. Brinkmann
在超大规模集成微电子制造中，磁增强反应离子刻蚀（MERIE）反应器被建立用于许多导电或介电材料的干法刻蚀工艺。入射粒子（离子和中性粒子）以及离子和中性粒子的通量的表面的角和能量分辨的分布起着至关重要的作用，特征尺度轮廓演变。这项工作的重点是设置在中性离子通量比的计算。为此，采用面向技术的计算机辅助设计模拟工具混合等离子体鞘层模型（HPSM）对MERIE反应堆边界鞘层进行了模拟。HPSM由流体动力学部分与蒙特卡罗部分的自洽耦合组成。鞘和预鞘区域在一个统一的模型中描述。除了正离子种类之外，还可以监测撞击表面的高能中性粒子。模拟参数的范围内约100毫托，射频电压的几个100 V，磁场的…
In very large scale integrated microelectronics fabrication magnetically enhanced reactive ion etch (MERIE) reactors are established for many dry etch processes of conducting or dielectric materials. Angularly and energetically resolved distributions of the surfaces incident particles (ions and neutrals) as well as the fluxes of ions and neutrals play an essential role for feature scale profile evolution. The focus of this work is set on the calculation of the neutral to ion fluxes ratio. Therefore the MERIE reactor’s boundary sheath is simulated by the technology-oriented computer aided design simulation tool hybrid plasma sheath model (HPSM). HPSM consists of a self-consistent coupling of a fluid dynamical part to a Monte Carlo part. The sheath and presheath regions are described in one unified model. Energetic neutrals impinging the surface can be monitored in addition to the positive ion species. Simulations with parameters in the range of about 100 mTorr, rf voltages of a few 100 V, magnetic fields o...