Contrast effects using a two‐detector system in low‐voltage scanning electron microscopy
Contrast effects using a two‐detector system in low‐voltage scanning electron microscopy
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在低压扫描电子显微镜中使用双探测器系统的对比效果
DOI：
10.1046/j.1365-2818.1996.116396.x
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发表时间：
1996
影响因子：
2
通讯作者：
L. Reimer
中科院分区：
文献类型：
--
作者：
M. Kässens;L. Reimer
两个相反的埃弗哈特-索恩利探测器A和B的系统以前被应用于传统的电子能量在5到20 keV之间的SEM中，通过和和差分信号来分离材料、地形和其他类型的对比。该技术也可以成功地用于低压扫描电子显微镜。随着电子能量的减小，信息深度的减小显示出表面组成和污染的差异，这些差异在5 keV以上无法观察到。在5 keV以下，材料和地形对比度可以分别通过A + B和A - B信号分离和增加。
A system of two opposite Everhart–Thornley detectors A and B has formerly been applied in conventional SEM for electron energies between 5 and 20 keV to separate material, topographic and other types of contrast by sum and difference signals. This technique can also be used successfully for low‐voltage scanning electron microscopy. The decreasing information depth with decreasing electron energy shows differences in the surface composition and contamination which cannot be observed beyond 5 keV. Also below 5 keV material and topographic contrast can be separated and increased by the A + B and A − B signals, respectively.