Rapid transport of nano-particles having a fractional elemental charge on average in capacitivelly coupled rf discharges by amplitude modulating discharge voltage(Invited talk)
Rapid transport of nano-particles having a fractional elemental charge on average in capacitivelly coupled rf discharges by amplitude modulating discharge voltage(Invited talk)
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通过调幅放电电压在电容耦合射频放电中平均具有分数元素电荷的纳米颗粒的快速传输(特邀演讲)
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发表时间:
2007
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通讯作者:
Shinya Iwashita and Syota Nunomura
中科院分区:
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作者:
Masaharu Shiratani;Kazunori Koga;Shinya Iwashita and Syota Nunomura