Shape precompensation in two-photon laser nanowriting of photonic lattices
Shape precompensation in two-photon laser nanowriting of photonic lattices
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DOI：
10.1063/1.1807019
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发表时间：
2004-10-25
影响因子：
4
通讯作者：
Kawata, S
中科院分区：
文献类型：
--
作者：
Sun, HB;Suwa, T;Kawata, S
首先分析了双光子聚合技术制备的光子晶体不存在光子带隙效应的原因。在此基础上，采用了微机械制造中常用的基于亚衍射限制分辨率的精细量化像素写入方案。结果表明，该方法具有较高的描绘精度和较好的再现性，可用于光子带隙效应的制备和观测。更重要的是，该方法允许对聚合的光化学反应引起的结构收缩进行精确的预补偿，这可能为高保真制造严格要求结构参数的聚合物光子和光电子器件铺平道路。(C) 2004年美国物理研究所。
We first analyze why most of the photonic crystals produced by two-photon photopolymerization technique exhibit no photonic band gap effect. And then subdiffraction-limited resolution-enabled finely quantified pixel writing, a scheme that has been used in micromachine fabrication, is adopted as the solution. As a result, higher accuracy in depicting and better reproducibility in both fabrication and photonic band gap effect observation are obtained. More important, the method allows for precise precompensation of the structure shrinkage induced by photochemical reactions of polymerization, which may pave the way to high-fidelity fabrication of polymer photonic and optoelectronic devices that require strictly the structural parameters. (C) 2004 American Institute of Physics.