Torsion/cantilever-based MEMS bistable mechanisms with different support configurations: structure design and comparison
Torsion/cantilever-based MEMS bistable mechanisms with different support configurations: structure design and comparison
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DOI：
10.1088/0960-1317/21/4/045007
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发表时间：
2011-04
影响因子：
2.3
通讯作者：
Yibo Wu;Congchun Zhang;Hong Wang;G. Ding
中科院分区：
文献类型：
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作者：
Yibo Wu;Congchun Zhang;Hong Wang;G. Ding
三种类型的扭转/基于MEMS对于支撑结构，分别有十字形、环形和菱形支撑梁。所提出的MEMS BM包括一个自由的扭转为基础的悬臂，形成一个对称的摇杆。自由-自由悬臂由支撑骨架悬挂，支撑骨架又连接到扭转悬臂。一个永久磁铁附在旁边，用于保持与坡莫合金软磁路的闭合状态。不同的特殊支撑配置说明了悬臂梁的低扭转柔度。为了推导出BM系统的等效刚度系数，利用经典梁理论对3种基于扭转/扭转的MEMS BM进行了力学建模。同时，利用麦克斯韦电磁理论推导了静磁闭锁力。这些MEMS BM的性能进行了比较的静态变形变化，等效刚度系数和动态切换特性的评价。最后，通过原子力显微镜结合纳米压痕测试仪表征了机械性能。此外，理论分析和实验结果证明了MEMS双稳态。在这些BM中，环形MEMS BM由于与其他类型相比相对较低的刚度而非常容易偏转。基于扭转/扭转的MEMS BM在低功耗闭锁继电器领域具有潜在的应用前景。
Three types of torsion/cantilever-based MEMS bistable mechanisms (BMs) with different support configurations have been constructed, modeled and experimented. For the support configuration, there is a crisscross-shaped, a ring-shaped and a diamond-shaped support beam, respectively. The proposed MEMS BMs consist of a free–free torsion-based cantilever which forms a symmetrical rocker lever. The free–free cantilever is suspended by a support skeleton which in turn is attached to a torsion cantilever. A permanent magnet is attached beside for holding the closed state with a permalloy soft magnetic circuit. The different special support configurations account for a low torsional compliance with the overhanging beams. In order to deduce the equivalent stiffness coefficient of BM systems, mechanical modeling of three types of torsion/cantilever-based MEMS BMs was performed by the classical beam theorem. Meanwhile, the magnetostatic latching force was also deduced by the Maxwell electromagnetism theory. The performances of these MEMS BMs have been compared by the evaluation of static deformation variations, equivalent stiffness coefficients and dynamical switching characterizations. Finally, mechanical performance was characterized by atomic force microscopy, combined with a Nanoindentation Tester. In addition, bistabilities of the MEMS BMs were proved by theoretical analysis as well as experimental results. Among these BMs, the ring-shaped MEMS BM is extremely prone to deflect due to relatively low stiffness compared with other types. The torsion/cantilever-based MEMS BMs have potential application in the field of latching relays with low power consumption.