Analysis of nitrogen plasma generated by a pulsed plasma system near atmospheric pressure
Analysis of nitrogen plasma generated by a pulsed plasma system near atmospheric pressure
复制标题
DOI：
10.1063/1.1810202
复制
发表时间：
2004-11
影响因子：
3.2
通讯作者：
R. Hayakawa;T. Yoshimura;A. Ashida;N. Fujimura;H. Kitahata;M. Yuasa
中科院分区：
文献类型：
--
作者：
R. Hayakawa;T. Yoshimura;A. Ashida;N. Fujimura;H. Kitahata;M. Yuasa
在两个平行板电极之间施加交替脉冲电压时，即使在大气压下也能保持纯氮的稳定放电。我们评估了由交替脉冲电压系统产生的氮等离子体。用光学发射光谱法对纯氮等离子体中受激态氮进行了评价。在放电空间中，检测到的最大峰值对应于N2秒正体系。此外，在高达45Torr的压力下，激发氮原子的发射峰被检测到。在下游空间，我们探测到了N2赫尔曼红外系统和N2秒正系统的发射峰。N2 （AΣu+3）状态被认为是N2赫尔曼红外系统的起源。N2第二正系统和N2赫尔曼红外系统的发射强度随氮气压力的增加而增加，而N2+第一负系统的发射强度则降低。
Stable discharging of pure nitrogen can be maintained even at atmospheric pressure when alternative pulsed voltage is applied between two parallel plate electrodes. We evaluated the nitrogen plasma generated by an alternative pulsed voltage system. The excited nitrogen species in a pure nitrogen plasma was evaluated using optical emission spectroscopy. In the discharging space, the largest peak detected corresponded to the N2 second positive system. Additionally, the emission peaks from the excited nitrogen atom were detected at a pressure of as high as 45Torr. In the downstream space, we detected emission peaks from the N2 Herman’s infrared system as well as the N2 second positive system. The N2 (AΣu+3) state is considered to be the origin of the N2 Herman’s infrared system. The emission intensities from the N2 second positive system and the N2 Herman’s infrared system increase with increasing nitrogen gas pressure, whereas the emission intensity from the N2+ first negative system decreases.