Quantifying X-Ray Fluorescence Data Using MAPS
Quantifying X-Ray Fluorescence Data Using MAPS
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DOI：
10.3791/56042
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发表时间：
2018-02-01
影响因子：
1.2
通讯作者：
Bertoni, Mariana I.
中科院分区：
文献类型：
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作者：
Nietzold, Tara;West, Bradley M.;Bertoni, Mariana I.
通过将原始光谱拟合到已知标准来量化X射线荧光（XRF）显微镜图对于评估材料内的化学成分和元素分布至关重要。基于同步加速器的XRF已成为各种研究主题的完整表征技术，特别是由于其非破坏性和高灵敏度。今天，同步加速器可以在远低于一微米的空间分辨率下获得荧光数据，从而可以在纳米级上评估成分变化。通过适当的定量，可以深入、高分辨率地了解元素偏析、化学计量关系和聚集行为。本文介绍了如何使用阿贡国家实验室开发的MAPS拟合软件对全二维XRF图谱进行定量。我们使用来自Cu（In，Ga）Se-2太阳能电池的结果作为示例，该结果在阿贡国家实验室的高级光子源光束线2-ID-D处获得。我们展示了拟合原始数据的标准程序，演示了如何评估拟合的质量，并展示了程序生成的典型输出。此外，我们在本手稿中讨论了某些软件的局限性，并提供了如何进一步校正数据的建议，使其在数值上准确，并代表空间分辨的元素浓度。
The quantification of X-ray fluorescence (XRF) microscopy maps by fitting the raw spectra to a known standard is crucial for evaluating chemical composition and elemental distribution within a material. Synchrotron-based XRF has become an integral characterization technique for a variety of research topics, particularly due to its non-destructive nature and its high sensitivity. Today, synchrotrons can acquire fluorescence data at spatial resolutions well below a micron, allowing for the evaluation of compositional variations at the nanoscale. Through proper quantification, it is then possible to obtain an in-depth, high-resolution understanding of elemental segregation, stoichiometric relationships, and clustering behavior.This article explains how to use the MAPS fitting software developed by Argonne National Laboratory for the quantification of full 2-D XRF maps. We use as an example results from a Cu(In,Ga)Se-2 solar cell, taken at the Advanced Photon Source beamline 2-ID-D at Argonne National Laboratory. We show the standard procedure for fitting raw data, demonstrate how to evaluate the quality of a fit and present the typical outputs generated by the program. In addition, we discuss in this manuscript certain software limitations and offer suggestions for how to further correct the data to be numerically accurate and representative of spatially resolved, elemental concentrations.