Nano-CNC Machining of Sub-THz Vacuum Electron Devices
Nano-CNC Machining of Sub-THz Vacuum Electron Devices
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DOI：
10.1109/ted.2016.2594027
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发表时间：
2016-10-01
影响因子：
3.1
通讯作者：
Luhmann, Neville C., Jr.
中科院分区：
文献类型：
--
作者：
Gamzina, Diana;Himes, Logan G.;Luhmann, Neville C., Jr.
亚太赫兹（100-1000 GHz）真空电子器件的制造采用纳米计算机数控（CNC）加工技术。亚微米的功能公差和位置精度已经实现，几十纳米的表面粗糙度已被证明提供高品质的射频（RF）的传输和反射参数的测试电路结构。报告了以下器械的制造方法详情：W波段片状束（SB）速调管、两种220-GHz SB双交错光栅行波管（TWT）设计、用于电子顺磁共振谱仪的263-GHz SB TWT放大器、用于聚变等离子体诊断的346-GHz SB返波振荡器、346-GHz笔形束返波振荡器、和270 GHz笔形波束折叠波导行波管自驱动放大器。纳米数控加工纳米复合钪钨阴极以及被动射频元件的应用进行了讨论。
Nano-computer numerical control (CNC) machining technology is employed for the fabrication of sub-THz (100-1000 GHz) vacuum electron devices. Submicron feature tolerances and placement accuracy have been achieved and surface roughness of a few tens of nanometers has been demonstrated providing high-quality radio frequency (RF) transmission and reflection parameters on the tested circuit structures. Details of the manufacturing approach are reported for the following devices: W-band sheet beam (SB) klystron, two designs of a 220-GHz SB double-staggered grating traveling wave tube (TWT), 263-GHz SB TWT amplifier for an electron paramagnetic resonance spectrometer, 346-GHz SB backward wave oscillator for fusion plasma diagnostics, 346-GHz pencil beam backward wave oscillator, and 270-GHz pencil beam folded waveguide TWT self-driving amplifier. Application of the nano-CNC machining to nanocomposite scandate tungsten cathodes as well as to passive RF components is also discussed.