Micropatterning of chloromethylphenylsiloxane self-assembled monolayer photochemically amprified with atmospheric oxygen

Micropatterning of chloromethylphenylsiloxane self-assembled monolayer photochemically amprified with atmospheric oxygen
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大气氧光化学放大氯甲基苯基硅氧烷自组装单层的微图案化

DOI:
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发表时间:
2005
期刊:
Jpn. J. Appl. Phys. 44
影响因子:
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通讯作者:
Lan Hong and Kyung-Huwang Lee
Lan Hong and Kyung-Huwang Lee
中科院分区:
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文献类型:
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作者:
Hiroyuki Sugimura;Lan Hong and Kyung-Huwang Lee

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