Dual-axis microgyroscope with closed-loop detection
Dual-axis microgyroscope with closed-loop detection
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DOI：
10.1016/s0924-4247(98)00247-7
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发表时间：
1999-03-09
影响因子：
4.6
通讯作者：
Song, CM
中科院分区：
文献类型：
--
作者：
An, S;Oh, YS;Song, CM
研制了一种新型的双轴微陀螺仪，采用表面微机械加工工艺制作。通过LPCVD（低压化学气相沉积）沉积的7.0 μ m厚的多晶硅层用于振动结构。微陀螺是基于四个板的角振动与闭环速率检测。梳状驱动旋转体相对于平行于衬底的每个输入轴倾斜，并且利用底部电极和结构之间的电容变化来感测倾斜运动。两种倾斜模式使传感器能够在单芯片内同时检测两个输入轴的角速率。特别地，该结构利用简单的力平衡扭转扭矩，其不需要另一顶部电极层来减小电容型传感器的固有非线性。由于振动结构受到空气的强烈阻尼，因此陀螺仪在高真空室中进行测试，以获得高品质因数，并采用混合信号调理集成电路。该实验产生了0.1度/秒的噪声等效信号。(C)1999年Elsevier Science S.A. All rights reserved.
A novel dual-axis microgyroscope fabricated by a surface micromachining process is developed. A 7.0-mu m thick polysilicon layer deposited by LPCVD (Low Pressure Chemical Vapor Deposition) is used for the vibrating structure. The microgyroscope is based on the angular vibration of the four plates with closed-loop rate detection. The comb-driven rotational body tilts to each input-axis parallel to the substrate and the tilting motion is sensed with capacitance change between the bottom electrode and the structure. The two tilting modes enable the sensor to detect two-input axis angular rate simultaneously within a single-chip. In particular, the structure utilizes a simple force-balancing torsional torque which does not need another top electrode layer to reduce the intrinsic non-linearity of a capacitance-type sensor. The vibrating structure is strongly damped by air, so the gyroscope is tested in a high vacuum chamber for a high quality factor with hybrid signal-conditioning integrated circuit. The experiment resulted in a noise equivalent signal of 0.1 degrees/s. (C) 1999 Elsevier Science S.A. All rights reserved.