A Novel 3-axis Monolithic Silicon Accelerometer
A Novel 3-axis Monolithic Silicon Accelerometer
复制标题
DOI：
10.1109/sensor.1995.721892
复制
发表时间：
1995-06
期刊：
影响因子：
--
通讯作者：
G. Andersson
中科院分区：
文献类型：
--
作者：
G. Andersson
Chalmers理工大学与Saab Combitech AB和固态电子系合作，制造了一种新型3轴单片硅加速度计[1]的工作原型。来自原型的经验是最令人鼓舞的，因为它们证实了可以忽略的跨轴灵敏度的理论预测。在笛卡尔坐标系中，将任意方向加速度分离成加速度矢量的精度几乎超出了预期。该加速度计具有很好的发展潜力，可以发展成为低成本的0- 2g范围内分辨率约为10mg的3轴加速度计。部分原因是制造过程简单。
Working prototypes of a novel 3-axis monolithic silicon accelerometer [1] have been manufactured at Chalmers University of Technology in co-operation with Saab Combitech AB and the Department of Solid State Electronics. Experience from the prototypes is most encouraging as they have confirmed the theoretical predictions of negligible cross-axis sensitivity. The accuracy in the separation of an arbitrary directed acceleration into acceleration vectors in a Cartesian system of coordinates has shown to be high almost beyond expectation. The accelerometer has good potential to develop into a low cost 3-axis accelerometer in the 0-2 g range with a resolution of about 10 mg. This in part due to the simple manufacturing process.