Miniature all-fiber Fabry-Perot sensor for simultaneous measurement of pressure and temperature
Miniature all-fiber Fabry-Perot sensor for simultaneous measurement of pressure and temperature
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DOI：
10.1364/ao.51.004536
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发表时间：
2012-07-01
期刊：
影响因子：
1.9
通讯作者：
Donlagic, Denis
中科院分区：
文献类型：
--
作者：
Pevec, Simon;Donlagic, Denis
本文介绍了一种小型、高灵敏度、全硅法布里-珀罗光纤传感器，适用于压力和温度的同时测量。建议的传感器直径不超过125 μ m，由两个低精细度的法布里-珀罗谐振器创建在一个光纤的尖端。第一谐振器以位于光纤尖端的短空气腔的形式实施。该谐振器利用薄的石英膜片来实现传感器的压力响应。第二个谐振腔利用石英光纤的折射率依赖性，以提供所提出的传感器的温度测量功能。两个谐振器具有基本上不同的长度，这允许直接的光谱分辨信号处理和所施加的压力和温度的明确确定。(c)2012美国光学学会
This article presents a miniature, high-sensitivity, all-silica Fabry-Perot fiber-optic sensor suitable for simultaneous measurements of pressure and temperature. The proposed sensor diameter does not exceed 125 mu m and consists of two low-finesse Fabry-Perot resonators created at the tip of an optical fiber. The first resonator is embodied in the form of a short air cavity positioned at the tip of the fiber. This resonator utilizes a thin silica diaphragm to achieve the sensor's pressure response. The second resonator exploits the refractive index dependence of silica fiber in order to provide the proposed sensor's temperature measurement function. Both resonators have substantially different lengths that permit straightforward spectrally resolved signal processing and unambiguous determination of the applied pressure and temperature. (c) 2012 Optical Society of America