A synchrotron-radiation-based variable angle ellipsometer for the visible to vacuum ultraviolet spectral range.
A synchrotron-radiation-based variable angle ellipsometer for the visible to vacuum ultraviolet spectral range.
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一种基于同步辐射的可变角椭偏仪，适用于可见光到真空紫外光谱范围。
DOI：
10.1063/1.4878919
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发表时间：
2014
期刊：
影响因子：
--
通讯作者：
N. Esser
中科院分区：
文献类型：
--
作者：
M. Neumann;C. Cobet;H. Kaser;M. Kolbe;A. Gottwald;M. Richter;N. Esser
介绍了一种安装在柏林计量光源插入装置光束线上的旋转分析器、光谱偏振仪和椭偏仪，以及安装在该装置上的宽量程θ-2θ测角仪。结合基于透射式和反射式偏振元件以及波动器辐射固有的偏振度，该椭偏仪能够覆盖从大约2 eV到40 eV的光子能量。此外，还提出了一种新的基于CaF2菲涅耳菱体的补偿器设计。这种补偿器允许在真空紫外光谱范围内使用圆偏振进行椭圆偏振测量，从而例如表征去偏振样品。这种新仪器最初用于表征光束线的偏振特性。通过对外延生长的氧化锌的介电功能的内聚大范围测量，证明了椭偏仪的技术能力。
A rotating analyzer spectroscopic polarimeter and ellipsometer with a wide-range θ-2θ goniometer installed at the Insertion Device Beamline of the Metrology Light Source in Berlin is presented. With a combination of transmission- and reflection-based polarizing elements and the inherent degree of polarization of the undulator radiation, this ellipsometer is able to cover photon energies from about 2 eV up to 40 eV. Additionally, a new compensator design based on a CaF2 Fresnel rhomb is presented. This compensator allows ellipsometric measurements with circular polarization in the vacuum ultraviolet spectral range and thus, for example, the characterization of depolarizing samples. The new instrument was initially used for the characterization of the polarization of the beamline. The technical capabilities of the ellipsometer are demonstrated by a cohesive wide-range measurement of the dielectric function of epitaxially grown ZnO.
影响因子：
3.7
作者：
Feneberg, Martin;Romero, Maria Fatima;Goldhahn, Ruediger
通讯作者：
Goldhahn, Ruediger