Vacuum ultraviolet ellipsometer using inclined detector as analyzer to measure stokes parameters and optical constants — With results for AlN optical constants
Vacuum ultraviolet ellipsometer using inclined detector as analyzer to measure stokes parameters and optical constants — With results for AlN optical constants
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DOI：
10.1016/j.tsf.2014.02.099
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发表时间：
2014-11
期刊：
影响因子：
2.1
通讯作者：
Takeyasu Saito;K. Ozaki;K. Fukui;H. Iwai;Kohji Yamamoto;H. Miyake;K. Hiramatsu
中科院分区：
文献类型：
--
作者：
Takeyasu Saito;K. Ozaki;K. Fukui;H. Iwai;Kohji Yamamoto;H. Miyake;K. Hiramatsu
