Wafer handling with levitation
Wafer handling with levitation
复制标题
悬浮晶圆处理
DOI：
10.1142/s0960313192000133
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发表时间：
1992
期刊：
影响因子：
--
通讯作者：
Thangali Seshadri
中科院分区：
文献类型：
--
作者：
A. Koh;R. Ford;Thangali Seshadri
半导体行业一直在寻找更清洁、更安全的方法来处理和运输半导体晶圆。本文介绍了利用悬浮处理和移动晶圆片的研究。一个铰接臂操纵一个小平台，该平台通过悬浮的方式携带一个薄片。气浮和磁悬浮都采用。建造了几个不同设计的天然气平台。每一个都可以通过平台顶部的气体垫来支撑一个晶圆。任何晶圆片的横向漂移都可以通过倾斜平台来抵消。在最先进的配置中，平台由三个手指组成。手指之间的空间允许两个平台相互配合，从而允许晶圆片从一个平台转移到另一个平台而不接触。手指的侧面也有吸力，以消除晶圆周围的湍流。建立了一个“磁悬浮”平台，利用波动的磁场使导电晶圆支架悬浮起来。在气体环境下，所有平台都可以实现稳定和完全的悬浮，但只有磁悬浮平台可以在真空环境下运行。实验证明了悬浮处理晶圆的可行性，但还需进一步改进。
The semiconductor industry is constantly looking for cleaner and safer methods of handling and transporting semiconductor wafers during manufacturing. This paper describes research on the use of levitation to handle and move wafers. An articulated arm manipulates a small platform which carries a single wafer by means of levitation. Both gas-bearing and magnetic levitation are employed. Several gas platforms of different designs are built. Each can support a wafer with a cushion of gas issuing from the top of the platform. Any lateral drift of the wafer is counteracted by tilting the platform. In the most advanced configuration, the platform consists of three fingers. The spaces between the fingers permit two platforms to interfit thus allowing transfer of the wafer from one platform to the other without contact. The fingers also have suction on the side to withdraw turbulence around the wafer. A ‘maglev’ platform is built which uses a fluctuating magnetic field to levitate a conductive wafer holder. Stable and complete levitation are achieved in all the platforms for gaseous environments, but only the maglev platform can operate in a vacuum. The experiments prove the feasibility of levitation for wafer handling but more refinement is required.