Effects of Thermal Fluctuations and Block Copolymers Compositions on Defects in Directed Self-assembly Contact Hole Shrink Process
Effects of Thermal Fluctuations and Block Copolymers Compositions on Defects in Directed Self-assembly Contact Hole Shrink Process
复制标题
热波动和嵌段共聚物成分对定向自组装接触孔收缩工艺缺陷的影响
DOI：
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发表时间：
2014
期刊：
影响因子：
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通讯作者：
S. Mimotogi
中科院分区：
文献类型：
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作者：
K. Fukawatase;K. Yoshimoto;Y. Naka;S. Maeda;S. Tanaka;S. Morita;H. Aoyama;S. Mimotogi
