Compact sensor for measuring two-dimensional tilt using a two-dimensional transmission grating and the Talbot effect.
Compact sensor for measuring two-dimensional tilt using a two-dimensional transmission grating and the Talbot effect.
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DOI：
10.1364/ao.50.000261
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发表时间：
2011-01
期刊：
影响因子：
1.9
通讯作者：
K. Iwata;K. Satoh;K. Moriwaki
中科院分区：
文献类型：
--
作者：
K. Iwata;K. Satoh;K. Moriwaki
提出了一种利用塔尔博特效应测量平面反射物体微小二维倾斜的倾斜传感器。它是以前提出的一维倾斜传感器的扩展。从物体反射的光束照射在六边形光栅上，并且在位于距光栅塔尔博特距离处的图像传感器上检测衍射波的强度。衍射强度由于物体的倾斜而移位。通过傅立叶变换方法计算位移，以获得二维倾斜。该传感器非常简单且紧凑。传感器的原理解释了一般模式的光栅。用六边形光栅进行的实验表明了该方法的有效性。并对如何使其更实用进行了讨论。
This paper proposes a tilt sensor that measures the small two-dimensional tilt of a plane reflective object using the Talbot effect. It is an extension of a previously proposed one-dimensional tilt sensor. The light beam reflected from the object impinges on a hexagonal grating, and the intensity of the diffracted wave is detected on an image sensor located at a Talbot distance from the grating. The diffraction intensity displaces due to the tilt of the object. The displacement is calculated by the Fourier transform method to obtain the two-dimensional tilt. This sensor is very simple and compact. The principle of the sensor is explained for a grating with a general pattern. An experiment using a hexagonal grating shows its validity. Discussions are given for making it more practical.