Focused Ultrasonic Transducer with Electrically Controllable Focal-Point Location
Focused Ultrasonic Transducer with Electrically Controllable Focal-Point Location
复制标题
具有电控焦点位置的聚焦超声波换能器
DOI：
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发表时间：
2018
期刊：
影响因子：
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通讯作者：
Eun SokKim
中科院分区：
文献类型：
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作者：
Lurui Zhao;Eun SokKim
本文描述了焦点位置可电控的聚焦超声换能器的建模、设计、制造和测量。该传感器建立在 1.02 毫米厚的锆钛酸铅 (PZT) 基板上，由 6 个饼形镍沉积电极部分组成，每个部分沿其半径分为 3 个子区域（内、中和外）。由 20μm 厚的聚对二甲苯密封气腔制成的部分菲涅耳透镜构建在电极子区域的顶部，其设计为沿扇形半径偏移，从而为每个子区域提供偏心的焦点位置。通过对每个子区域电极的电寻址能力，换能器可以被配置为将聚焦超声传送到其焦平面上的不同焦点。我们制造了一种传感器，能够通过驱动不同组的电极在其焦平面上提供多个焦点，并通过使用点水听器测量声压来演示其功能。
This paper describes the modeling, design, fabrication and measurement of a focused ultrasonic transducer with electrically controllability over the focal point location. Built on a 1.02 mm thick lead zirconate titanate (PZT) substrate, the transducer consists of 6 pie-shape sectors of nickel deposited electrodes, with each sector divided into 3 sub-regions along its radius (inner, middle and outer). Partial Fresnel lenses made of 20μm-thick Parylene-sealed air-cavities are built on the top of electrode sub-regions, which are designed to be offset along the sector radius to deliver an off-centered focal point position for each sub-region. With the electrical addressability to each subregion electrode, the transducer can be configured to deliver focused ultrasound to different focal points on its focal plane. We have fabricated a transducer capable of delivering multiple focal points over its focal plane through actuating different sets of the electrodes, and demonstrated its functionality by measuring the acoustic pressure with a point hydrophone.