Magnetic properties of sputtered Nd-Fe-B films
Magnetic properties of sputtered Nd-Fe-B films
复制标题
溅射Nd-Fe-B薄膜的磁性能
DOI：
10.1016/0304-8853(86)90697-9
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发表时间：
1986
影响因子：
2.7
通讯作者：
L. Wickramasekara
中科院分区：
文献类型：
--
作者：
F. Cadieu;T. Cheung;L. Wickramasekara
利用选择性热溅射的方法在加热的衬底上合成了高能产物Nd2Fe14B化合物的薄膜样品。室温本征矫顽力（iHc）可达16koe。对于相对较低的衬底沉积温度，轴织构主要在薄膜平面外。对于较高的衬底温度，轴织构主要在衬底的平面上。
Film samples of the high energy product, Nd2Fe14B compound, have been synthesized by selectively thermalized sputtering onto heated substrates. Room temperature intrinsic coercive forces,iHc, up to 16 kOe have been observed. For relatively low substrate deposition temperatures, thec-axis texture was predominantly out of the film plane. For higher substrate temperatures thec-axis texture was predominantly in the plane of the substrates.