New Sensing Model of (Mesoporous) In2O3

New Sensing Model of (Mesoporous) In2O3
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(介孔)In2O3 的新传感模型

DOI:
10.1007/5346_2013_57
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发表时间:
2013
期刊:
Journal of Materials Science: Materials in Electronics
影响因子:
--
通讯作者:
M. Tiemann
M. Tiemann
中科院分区:
--
文献类型:
--
作者:
T. Wagner;N. Donato;M. Tiemann

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最近,氧化铟(In 2 O3)作为半导体气体传感器中的感测层的材料引起注意。与经常研究的材料如二氧化锡(SnO 2),三氧化钨(WO 3)或氧化镓(Ga 2 O3)相比,氧化铟具有一些独特的特性。最突出的一个是其在低操作温度(<150°C)下对臭氧(O3)或二氧化氮(NO2)等氧化性气体的选择性。结合纳米铸件的光还原特性,可以制备具有快速响应的多孔In 2 O3高选择性传感层。在某些情况下,甚至室温测量也是可能的;因此这种材料允许设计低功率传感器,而不需要特殊的传感器基板(例如,μ-热板)。对感知机制的详细分析表明,已知的感知模型无法描述所观察到的效应。因此,提出了一种新的有序纳米多孔In_2O_3传感模型,该模型也适用于非结构材料。
Recently indium oxide (In2O3) attracted attention as a material for sensing layers in semiconducting gas sensors. Compared to frequently investigated materials like tin dioxide (SnO2), tungsten trioxide (WO3), or gallium oxide (Ga2O3) indium oxide offers some unique properties. The most prominent one is its selectivity to oxidizing gases such as ozone (O3) or nitrogen dioxide (NO2) at low operating temperatures (<150°C). Combined with the photoreduction properties of nanocast, porous In2O3 highly selective sensing layers with a fast response can be prepared. In some cases even room temperature measurements are possible; therefore this material allows for designing low-power sensors without the need for special sensor substrates (e.g., μ-hotplates). Detailed analysis of the sensing mechanism reveals that known sensing models are not able to describe the observed effects. Therefore a new sensing model for ordered nanoporous In2O3 is presented which will be applicable for nonstructured material too.
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