LASER-BEAM SCANNING BY ROTARY MIRRORS .1. MODELING MIRROR-SCANNING DEVICES
LASER-BEAM SCANNING BY ROTARY MIRRORS .1. MODELING MIRROR-SCANNING DEVICES
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DOI：
10.1364/ao.34.006403
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发表时间：
1995-10-01
期刊：
影响因子：
1.9
通讯作者：
KATZ, J
中科院分区：
文献类型：
--
作者：
LI, YJ;KATZ, J
本文介绍了一种跟踪激光束通过含有可动平面镜的光学系统的路径的矢量方法，它允许统一处理一些基本的镜扫描装置。我们表明，由镜扫描系统产生的扫描场是一个曲面与直线作为其生成元素。扫描场的横截面可以是圆形、椭圆形或蛋形曲线。基于这种理解，一些高级主题得到解决，例如，分析了扫描场与扫描图形的关系、扫描图形与观察面位置和方向的关系、扫描图形中的光学畸变、扫描光束在观察面上非垂直入射引起的光斑放大等问题，导出了直线和圆扫描技术中最常见的镜扫描装置的设计方程和曲线。第二部分分析了振镜式光学扫描仪中的桨式扫描仪和正多边形扫描仪。第三部分研究了X-Y扫描系统。
A vector approach to tracing the path of a laser beam through an optical system containing movable plane mirrors is described, which permits a unified treatment of a number of basic mirror-scanning devices. We show that the scan field produced by the mirror-scanning system is a curved surface with a straight line as its generating element. The cross section of the scan field can be a circle, an ellipse, or a curve in the shape of an egg. Based on this understanding, some advanced topics are addressed, e.g., the relationship between the scan field and the scan pattern, the dependence of the scan pattern on the location and orientation of the observation surface, optical distortions in a scan pattern, spot-size enlargement caused by non-normal incidence of the scan beam on the observation plane, and so on. Design equations and curves are derived for the mirror-scanning devices that most frequently exist in linear and circular scan technology. Part II contains an analysis of the galvanometer-based optical scanner paddle scanner and the regular polygon. In Part III, X-Y scanning systems are studied.