Metal Alkoxide Solution-Derived Epitaxial Lead Titanate-Based Thin-Film Optical Waveguides
Metal Alkoxide Solution-Derived Epitaxial Lead Titanate-Based Thin-Film Optical Waveguides
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金属醇盐溶液衍生的外延钛酸铅基薄膜光波导
DOI：
10.1143/jjap.34.5091
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发表时间：
1995
影响因子：
1.5
通讯作者：
Hiroaki Moriyama Hiroaki Moriyama
中科院分区：
文献类型：
--
作者：
K. Nashimoto;Shigetoshi Nakamura;Hiroaki Moriyama Hiroaki Moriyama
采用非水解甲氧基乙醇溶液固相外延法制备了用于光波导研究的钛酸铅基薄膜。PbTiO 3薄膜分别在SrTiO 3（100）和MgO（100）上以（001）和（100）择优取向结晶。PLT（28/100）薄膜在蓝宝石（011 <$2）衬底上以单一的（110）晶向结晶，但具有明显的晶粒结构。在MgO（100）衬底上外延生长的PZT薄膜具有明显的晶粒结构。在SrTiO_3（100）衬底上外延的PZT（52/48）薄膜具有单一的（001）取向，摇摆曲线半高宽约为0.1°，表面光滑，均方根粗糙度小于2 nm。在SrTiO 3上外延的PZT薄膜在633 nm处的光传输损耗小至8 dB/cm。
Lead titanate-based thin films were prepared for optical waveguide studies by nonhydrolyzed methoxyethoxide-solution-derived solid-phase epitaxy. PbTiO3 thin films crystallized with preferred (001) and (100) orientations on SrTiO3 (100) and MgO (100), respectively. PLT (28/100) thin films had obvious grain structure although they crystallized with a single (110) orientation on sapphire (011̄2) substrates. Epitaxial PZT thin films with a single (100) orientation crystallized on MgO (100) also had obvious grain structure. Epitaxial PZT (52/48) thin films on SrTiO3 (100) had a single (001) orientation, rocking curve full width at half-maximum of around 0.1°, and smooth surface of rms roughness less than 2 nm. The epitaxial PZT thin films on SrTiO3 showed optical propagation loss as small as 8 dB/cm at 633 nm.