Maskless writing of microfluidics: Rapid prototyping of 3D microfluidics using scratch on a polymer substrate
Maskless writing of microfluidics: Rapid prototyping of 3D microfluidics using scratch on a polymer substrate
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DOI：
10.1016/j.rcim.2010.06.004
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发表时间：
2011-04-01
影响因子：
10.4
通讯作者：
Klapperich, Catherine M.
中科院分区：
文献类型：
--
作者：
Do, Jaephil;Zhang, Jane Y.;Klapperich, Catherine M.
我们提出了一种新的快速成型方法，设计用于简单的制造3D微流体使用无掩模直写技术在聚合物基板上。整个过程由具有10 μ m分辨率精度和高速的商业切割机实现。在设置合适的力之后，使用切割机将顶部和底部微结构的CAD设计直接写在聚合物基底上。最小的通道宽度为20 μ m，获得了最小的力和100 μ m从最大。此外，从30 μ m到130 μ m，写入深度随力线性增加。几个3D微流体器件使用无掩模写入技术进行了演示。从CAD布局到最终3D设备的整个制造过程可以在30分钟内在洁净室设施外完成。(C)2010爱思唯尔有限公司版权所有。
We present a new rapid prototyping method designed for simple fabrication of 3D microfluidics using a maskless direct writing technique on polymer substrates. The entire process is enabled by a commercial cutter plotter with 10 mu m resolution precision and high speed. A CAD design of top and bottom microstructures is directly written on a polymer substrate using a cutter plotter after setting up the suitable force. The smallest channel width of 20 mu m was obtained with the minimum force and 100 mu m from the maximum. Also the written depth increased linearly with force from 30 to 130 mu m. Several 3D microfluidic devices are demonstrated using a maskless writing technique. The entire fabrication process from CAD layout to a final 3D device can be completed in 30 min outside the clean room facilities. (C) 2010 Elsevier Ltd. All rights reserved.