Position and out-of-straightness measurement of a precision linear air-bearing stage by using a two-degree-of-freedom linear encoder
Position and out-of-straightness measurement of a precision linear air-bearing stage by using a two-degree-of-freedom linear encoder
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DOI：
10.1088/0957-0233/21/5/054005
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发表时间：
2010-05-01
影响因子：
2.4
通讯作者：
Zeng Lijiang
中科院分区：
文献类型：
--
作者：
Kimura, Akihide;Gao, Wei;Zeng Lijiang
本文介绍了使用一种二自由度（two - DOF）线性编码器对精密线性气浮平台的X方向位置和Z方向的不直线度进行的测量，该编码器是一种用于同时测量二自由度位移的光学位移传感器。二自由度线性编码器由反射式单轴标尺光栅和光学传感器头组成。在光学传感器头中，一个参考光栅垂直于标尺光栅放置。通过来自两个光栅的±1级衍射光束产生的干涉信号可以获得二自由度位移。一个采用光栅周期约为1.67μm的标尺光栅的二自由度线性编码器原型测量了线性气浮平台的X方向位置和Z方向的不直线度。
This paper presents measurement of the X-directional position and the Z-directional out-of-straightness of a precision linear air-bearing stage with a two-degree-of-freedom (two-DOF) linear encoder, which is an optical displacement sensor for simultaneous measurement of the two-DOF displacements. The two-DOF linear encoder is composed of a reflective-type one-axis scale grating and an optical sensor head. A reference grating is placed perpendicular to the scale grating in the optical sensor head. Two-DOF displacements can be obtained from interference signals generated by the +/- 1 order diffracted beams from two gratings. A prototype two-DOF linear encoder employing the scale grating with the grating period of approximately 1.67 mu m measured the X-directional position and the Z-directional out-of-straightness of the linear air-bearing stage.