A high electromechanical coupling coefficient SHO Lamb wave lithium niobate micromechanical resonator and a method for fabrication
A high electromechanical coupling coefficient SHO Lamb wave lithium niobate micromechanical resonator and a method for fabrication
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DOI：
10.1016/j.sna.2014.01.033
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发表时间：
2014-03-01
影响因子：
4.6
通讯作者：
Friedmann, Thomas A.
中科院分区：
文献类型：
--
作者：
Olsson, Roy H., III;Hattar, Khalid;Friedmann, Thomas A.
我们提出了一种基于SHO Lamb波在单晶x切割铌酸锂（LiNbO3）薄悬浮板中传播的高耦合系数k(eff)(2)的微机械谐振器。利用He离子注入在晶圆表面下形成一层受损的LiNbO3层来制造薄板。该受损层在氢氟酸中选择性湿蚀刻，形成薄的悬浮LiNbO3板，而不需要先前报道的LiNbO3微加工方法中的晶圆键合、层破裂和化学机械抛光。耦合系数最高的谐振器是声传播与y轴旋转170度的谐振器，其中基模SHO兰姆波谐振器的板宽为20 μ m，相应的谐振频率为101 MHz，其k(eff)(2)为12.4%，质量因子为1300，谐振器的品质系数(m)为185。k (eff)(2)。和M是微机械谐振器中被报道最多的。(C) 2014 Elsevier B.V.版权所有
We present a high coupling coefficient, k(eff)(2), micromechanical resonator based on the propagation of SHO Lamb waves in thin, suspended plates of single crystal X-cut lithium niobate (LiNbO3). The thin plates are fabricated using ion implantation of He to create a damaged layer of LiNbO3 below the wafer surface. This damaged layer is selectively wet etched in a hydrofluoric (HF) acid based chemistry to form thin, suspended plates of LiNbO3 without the wafer bonding, layer fracturing and chemical mechanical polishing in previously reported LiNbO3 microfabrication approaches. The highest coupling coefficient is found for resonators with acoustic propagation rotated 170 degrees from the y-axis, where a fundamental mode SHO Lamb wave resonator with a plate width of 20 mu m and a corresponding resonant frequency of 101 MHz achieves a k(eff)(2) of 12.4%, a quality factor of 1300 and a resonator figure of merit (M) of 185. The k(eff)(2). and M are among the highest reported for micromechanical resonators. (C) 2014 Elsevier B.V. All rights reserved.