Z calibration of the LNE ultra precision coordinate measuring machine
Z calibration of the LNE ultra precision coordinate measuring machine
复制标题
LNE超精密三坐标测量机的Z校准
DOI：
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发表时间：
2007
期刊：
影响因子：
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通讯作者：
S. Ducourtieux
中科院分区：
文献类型：
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作者：
L. Lahousse;S. Leleu;J. David;O. Gibaru;S. Ducourtieux
摘要法国国家计量与试验学会（LNE）开发了一种创新的超精密坐标测量机[1，2]，可追溯到国家长度标准。该机器可配备不同类型的传感器，专门用于测量具有纳米不确定度的特征、标准和更一般的三维物体。测量范围为300 mm x 300 mm x 50 μm。不确定性的目标是，对于300 mm的位移，X和Y方向的不确定性达到30 nm，对于50 μm的垂直位移，不确定性达到约几nm。对于该机器的几何校准，已开发了专用程序。本文将更具体地关注用于Z校准的一个。
Abstract The Laboratoire National de Metrologie et d’Essais (LNE) has developed an innovative ultra precision coordinate measuring machine [1,2] traceable to the national length standard. This machine can be equipped with different kinds of sensors and is dedicated to the measurement with nanometer uncertainties of features, standards and in more general way three-dimensional objects. The measuring range is 300 mm x 300 mm x 50 μm. The objective in term of uncertainty is to reach 30 nm in X and Y directions for a 300 mm displacement and about few nanometers for the 50 μm vertical displacement. For the geometric calibration of this machine, dedicated procedures have been developed. The present paper will focus more specifically on the one used for the Z calibration.