Soft X-ray Scanning Transmission Microscopy Studies of Radiation Damage by Electron, Ion and X-ray Beams
Soft X-ray Scanning Transmission Microscopy Studies of Radiation Damage by Electron, Ion and X-ray Beams
复制标题
电子、离子和 X 射线束辐射损伤的软 X 射线扫描透射显微镜研究
DOI：
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发表时间：
2020
影响因子：
2.8
通讯作者：
N. Basim
中科院分区：
文献类型：
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作者：
A. Hitchcock;Hao Yuan;L. Melo;N. Basim
随着电子、离子和X射线探针的亮度增加，剂量（传递到样品的每单位体积的能量）通常会增加。在许多情况下，它是伴随的辐射损伤，而不是仪器的性能，限制了聚焦离子束样品制备或有意义的分析显微镜在高空间分辨率。我们正在使用扫描透射X射线显微镜（STXM）在软X射线区域进行系统的研究（i）辐射损伤率，（ii）样品化学和结构的修改，（iii）样品环境（温度，衬底，溶剂等）对损伤过程的影响。这些研究的结果为如何优化数据采集策略以最大限度地减少辐射损伤对分析显微镜的影响提供了见解
As the brightness of electron, ion and X-ray probes increases, the dose (energy per unit volume delivered to the sample) typically increases. In many situations it is the accompanying radiation damage rather than the instrument performance that limits focused ion beam sample preparation or meaningful analytical microscopy at high spatial resolution. We are using Scanning Transmission X-ray Microscopy (STXM) in the soft X-ray region for systematic studies of (i) rates of radiation damage, (ii) modifications of sample chemistry and structure, (iii) effect of sample environment (temperature, substrate, solvent, etc) on the damage process. The results of these studies provide insights into how to optimize data acquisition strategies to minimize the impact of radiation damage on analytical microscopy