CMOS Vertical Hall Magnetic Sensors on Flexible Substrate
CMOS Vertical Hall Magnetic Sensors on Flexible Substrate
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DOI：
10.1109/jsen.2016.2575802
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发表时间：
2016-12-15
影响因子：
4.3
通讯作者：
Dahiya, Ravinder
中科院分区：
文献类型：
--
作者：
Heidari, Hadi;Bonizzoni, Edoardo;Dahiya, Ravinder
本文介绍了不同的垂直霍尔传感器（VHS）的实现，采用0.18 μ m的CMOS技术和柔性基板上安装。各种几何形状的VHS已被研究，以获得最佳的传感器设备的尺寸和形状。COMSOL多物理场仿真结果进行了验证，在Cadence环境中实现的八电阻Verilog-A模型的电气行为。仿真和测量结果吻合良好。聚合物箔和当前的纺丝技术的使用补偿了由机械应力和可能的制造缺陷引起的影响。平面状态下低失调基本VHS的测量结果表明，电压模式下的灵敏度为59 +/- 1 V（AT）（-1），电流模式下的灵敏度为8 +/-0.1%T-1。
This paper presents the realization of different vertical Hall sensors (VHSs) implemented using a 0.18-mu m CMOS technology and mounted on flexible substrates. Various geometries of VHS have been studied to obtain the optimum sensor device dimension and shape. COMSOL multiphysics simulation results are validated with respect to the electrical behaviour of an eight-resistor Verilog-A model implemented in Cadence environment. Simulation and measurement results are in good agreement. The use of polymeric foils and current spinning technique compensate for the effects caused by mechanical stress and possible fabrication imperfections. Measurement results for a low-offset basic VHS in planar state show a sensitivity of 59 +/- 1 V(AT)(-1) in voltage mode and of 8 +/- 0.1 % T-1 in current mode.