Analysis of Microbolometer Characteristics for Antenna-Coupled Terahertz Detectors
Analysis of Microbolometer Characteristics for Antenna-Coupled Terahertz Detectors
复制标题
天线耦合太赫兹探测器的微测辐射热计特性分析
DOI：
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发表时间：
2013
期刊：
影响因子：
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通讯作者：
Akeda
中科院分区：
文献类型：
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作者：
Akoto;Oki;Asanori;Akeda
假设在天线耦合测辐射热计中用于检测太赫兹波，在硅衬底上用钛制造集成加热器和热敏电阻，并在室温下研究其响应度。为了建立微测辐射热计的响应度与其热敏电阻和加热器特性之间的关系，对热隔离加热器的电阻随电流的增加而增加以及由此引起的温度升高进行了电热模拟。仿真结果成功地再现了加热器电阻的变化规律。实验响应度显示出与预期趋势相反的行为。这种差异也解释了模拟和它的结论是，具有较长的加热器的微测辐射热计表现出较小的响应，由于测量频率的响应较慢。
Assuming the use in antenna-coupled bolometers to detect terahertz wave, an integrated heater and thermistor was fabricated with titanium on a silicon substrate and its responsivity was investigated at room temperature. To establish the correlation of microbolometer's responsivity on the properties of its thermistor and heater, an electro-thermal simulation was carried out for the resistance increase with current in thermally isolated heater and resultant increase of temperature. The behaviour of the heater resistance could be reproduced by the simulation successfully. The experimental responsivity shows opposite behaviour from the expected trend. This discrepancy was also explained by simulation and it was concluded that microbolometer with longer heater showed smaller responsivity due to the slower response for the measurement frequency.