Measurement of six degree motion error of linear stage
Measurement of six degree motion error of linear stage
复制标题
直线平台六度运动误差测量
DOI：
10.1088/1757-899x/211/1/012001
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发表时间：
2017
期刊：
影响因子：
--
通讯作者：
R. Furutani
中科院分区：
文献类型：
--
作者：
R. Furutani
本文提出了一种基于激光干涉仪测距的六自由度运动误差测量系统。该系统在直线工作台上有6个平行的激光光束和6个角锥面反射镜，反射相应的激光。轴向误差的测量采用激光干涉仪的常规测距方法。利用楔形棱镜的倾斜光束测量了轴向的垂直误差和滚转误差。俯仰和偏航误差通过两个角棱镜之间的距离差来测量。给出了角锥镜和其他光学器件的实验布置图。结果表明，该系统对轴向误差的分辨率为66.5 nm，对轴向垂直误差的分辨率为383 nm，对滚转误差的分辨率为1.23角秒，对俯仰和偏航误差的分辨率为0.429角秒。
In this paper, we propose measurement system of the six degree of motion errors which is based on distance measurement by the laser interferometer. The system has six parallel laser beams and six corner cube mirrors on the linear stage, which reflect the corresponding laser beams. The error of axial direction is measured with the ordinary distance measurement method by laser interferometer. The vertical errors to the axial direction and the roll errors are measured by tilted beams using the wedge prism. The pitch and yaw errors are measured by the difference between distance of two corner cube mirrors. The experimental layout of the corner cube mirrors and the other optical devices are shown. As a result, the resolution of 66.5 nm for error of the axial direction, the resolution of 383 nm for the vertical errors to the axial direction, the resolution of 1.23 arc-sec for the roll error and the resolution of 0.429 arc-sec for the pitch and yaw errors are obtained in this system.