Differential pressure sensor using a piezoresistive cantilever
Differential pressure sensor using a piezoresistive cantilever
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DOI：
10.1088/0960-1317/22/5/055015
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发表时间：
2012-05-01
影响因子：
2.3
通讯作者：
Shimoyama, Isao
中科院分区：
文献类型：
--
作者：
Takahashi, Hidetoshi;Nguyen Minh Dung;Shimoyama, Isao
本文报道了一种使用压阻悬臂梁的差压传感器，尺寸为125μm x 100μm x 0.3μm。由于悬臂的三个自由边缘，该传感器比传统隔膜传感器具有更高的灵敏度。测量结果表明，当施加压差时，所制造的悬臂梁按照理论弯曲。 -20 Pa 至 20 Pa 范围内压差的灵敏度和分辨率分别为 3.2 x 10 (4) Pa (1) 和 0.02 Pa。
This paper reports on a differential pressure sensor using a piezoresistive cantilever with the dimensions of 125 mu m x 100 mu m x 0.3 mu m. The sensor has a higher sensitivity than a traditional diaphragm sensor because of the three free edges of the cantilever. The measured results indicated that the fabricated cantilever bent according to theory when differential pressure was applied. The sensitivity and resolution of the differential pressure were 3.2 x 10 (4) Pa (1) and 0.02 Pa from -20 Pa to 20 Pa, respectively.