Fabrication and characterization of superhard tungsten boride layers deposited by radio frequency magnetron sputtering
Fabrication and characterization of superhard tungsten boride layers deposited by radio frequency magnetron sputtering
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DOI：
10.1016/j.ceramint.2016.04.166
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发表时间：
2016-08
影响因子：
5.2
通讯作者：
J. Chrzanowska;Ł. Kurpaska;M. Giżyński;J. Hoffman;Z. Szymański;T. Mościcki
中科院分区：
文献类型：
--
作者：
J. Chrzanowska;Ł. Kurpaska;M. Giżyński;J. Hoffman;Z. Szymański;T. Mościcki
过渡金属硼化物是超硬新材料最有前途的研究领域。这些材料是未来超硬层的候选材料之一，将与DLC和c-BN层竞争。本文研究了MoB型硼化钨（WB）涂层。用射频磁控溅射法在Si（100）、304不锈钢（SS 304）和Inconel 601衬底上沉积了WB层。本文制备的层的测量厚度为约1 μm，并且所有研究的样品都是致密、均匀和光滑的。通过使用光学轮廓仪、原子力显微镜和扫描电子显微镜进行表面调查。用X射线衍射仪（XRD）和透射电子显微镜（TEM）对样品进行了结构分析。XRD和TEM分析结果表明，WB层以（101）反射为主，并显示出晶粒尺寸为20-40 nm的细晶粒结构。研究了靶材溅射功率和环境气压对薄膜性能的影响。在1 ~ 5 mN的载荷下，比较了沉积在硅衬底上的WB层的硬度。沉积在SS 304和Inconel上的WB层的硬度被测量为高达50 mN。WB的所有层显示出超过40 GPa的优异硬度。
The most promising areas of research of new super-hard materials are transition metal borides. These materials are one of the candidates for future superhard layers that will be competitive to DLC and c-BN layers. In this paper MoB-type tungsten boride (WB) layers were examined. WB layers have been deposited by radio frequency magnetron sputtering on Silicon (100), 304 stainless steel (SS 304) and Inconel 601 substrates. Measured thickness of herein prepared layers was about 1 µm, and all studied samples were dense, uniform and smooth. Surface investigation was performed by using an optical profilometer, atomic force microscopy, and scanning electron microscopy. The structure analysis was examined by using X-ray diffractometer (XRD) and transmission electron microscopy (TEM) techniques. Results from the XRD and TEM analysis showed that WB layers were dominated by (101) reflection and indicated a fine grain structure with a grain size of 20–40 nm. The effect of target sputtering power and ambient gas pressure was investigated. The hardness of WB layers deposited on silicon substrate was compared under the load from 1 mN to 5 mN. The hardness of WB layers deposited on SS 304 and Inconel was measured up to 50 mN. All layers of WB revealed excellent hardness exceeding 40 GPa.