Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging
Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging
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DOI：
10.1364/oe.19.021333
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发表时间：
2011-10-24
期刊：
影响因子：
3.8
通讯作者：
David, Christian
中科院分区：
文献类型：
--
作者：
Vila-Comamala, Joan;Diaz, Ana;David, Christian
We have employed ptychographic coherent diffractive imaging to completely characterize the focal spot wavefield and wavefront aberrations of a high-resolution diffractive X-ray lens. The ptychographic data from a strongly scattering object was acquired using the radiation cone emanating from a coherently illuminated Fresnel zone plate at a photon energy of 6.2 keV. Reconstructed images of the object were retrieved with a spatial resolution of 8 nm by combining the difference-map phase retrieval algorithm with a non-linear optimization refinement. By numerically propagating the reconstructed illumination function, we have obtained the X-ray wavefield profile of the 23 nm round focus of the Fresnel zone plate ( outermost zone width, Delta r = 20 nm) as well as the X-ray wavefront at the exit pupil of the lens. The measurements of the wavefront aberrations were repeatable to within a root mean square error of 0.006 waves, and we demonstrate that they can be related to manufacturing aspects of the diffractive optical element and to errors on the incident X-ray wavefront introduced by the upstream beamline optics. (C) 2011 Optical Society of America
