LWIR high performance focal plane arrays Based on type-II strained layer superlattice (SLS) materials
LWIR high performance focal plane arrays Based on type-II strained layer superlattice (SLS) materials
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DOI：
10.1117/12.850976
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发表时间：
2010-04
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影响因子：
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通讯作者：
A. Hood;A. Evans;A. Ikhlassi;G. Sullivan;E. Piquette;D. Lee;W. Tennant;I. Vurgaftman;C. Canedy;E. Jackson;J. Nolde;C. Yi;E. Aifer
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文献类型：
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作者：
A. Hood;A. Evans;A. Ikhlassi;G. Sullivan;E. Piquette;D. Lee;W. Tennant;I. Vurgaftman;C. Canedy;E. Jackson;J. Nolde;C. Yi;E. Aifer
第二类应变超晶格(SLS)是一种迅速成熟的红外成像技术，其性能接近HgCdTe1，2，3，4。Teledyne成像传感器最近与海军研究实验室合作，展示了最先进的LWIR，SLS256×256焦平面阵列(FPA)，截止波长范围从9.4到11.5μm。这些阵列的暗电流性能在(最先进的)HgCdTe的10-20倍以内。未钝化和钝化器件的暗电流特性表现出对FPA应用至关重要的体限流特性。TIS还展示了快速衬底减薄过程，以增加通过GaSB衬底的红外透过率。除了这项工作之外，本报告还将讨论1K×1K长波长红外SLS FPA的最新发展。
Type-II strained layer superlattices (SLS) are a rapidly maturing technology for infrared imaging applications, with performance approaching that of HgCdTe1,2,3,4. Teledyne Imaging Sensors (TIS), in partnership with the Naval Research Laboratory (NRL), has recently demonstrated state-of-the-art, LWIR, SLS 256 × 256 focal plane arrays (FPAs) with cutoff wavelengths ranging from 9.4 to 11.5 μm. The dark current performance of these arrays is within a factor of 10-20 of (state-of-the-art) HgCdTe. Dark current characteristics of unpassivated and passivated devices exhibit bulk-limited behavior, essential for FPA applications. TIS has also demonstrated rapid substrate thinning processes for increased infrared transmission through the GaSb substrate. In addition to this work, this presentation will discuss the recent developments of 1K x 1K LWIR SLS FPAs.