Vapor-liquid-solid tri-phase pulsed-laser epitaxy of RBa2Cu3O7-y single-crystal films
Vapor-liquid-solid tri-phase pulsed-laser epitaxy of RBa2Cu3O7-y single-crystal films
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DOI：
10.1063/1.1432111
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发表时间：
2002-01-07
影响因子：
4
通讯作者：
Koinuma, H
中科院分区：
文献类型：
--
作者：
Yun, KS;Choi, BD;Koinuma, H
本文报道了用汽-液-固三相外延法制备RBa_2Cu_3O_（7-y）（R：稀土元素，R123）单晶薄膜的研究。该方法基于在从相关热力学相图预定的适当组合物和条件下应用脉冲激光沉积。激光烧蚀的R、Ba和Cu的气体以及它们的氧化物溶解到置于膜/衬底表面上的液态Ba 3Cu 5 Ox（3BaCuO（2）+2CuO）层中，渗透到达具有晶种R123的液-固界面，并且在准平衡状态下冷凝成固态R123相。通过X射线衍射、原子力显微镜和透射电子显微镜观察巨晶粒尺寸和原子级表面光滑度，验证了薄膜的均匀单晶性质。(C)2002年美国物理学会。
We report on the fabrication of single-crystalline thin films of RBa2Cu3O7-y (R: rare-earth element, R123) using an approach of vapor-liquid-solid tri-phase epitaxy. This method is based on application of pulsed-laser deposition under appropriate compositions and conditions predetermined from the relevant thermodynamic phase diagram. The laser-ablated gases of R, Ba, and Cu, and their oxides dissolve into a liquid Ba3Cu5Ox (3BaCuO(2)+2CuO) layer placed on the film/substrate surface, penetrate to reach the liquid-solid interface with a seed R123, and are condensed into the solid R123 phase under a quasiequilibrium state. The uniform single-crystalline nature of the film was verified by x-ray diffraction, atomic-force microscopy, and transmission electron microscopy by the observation of giant grain size and atomic-scale surface smoothness. (C) 2002 American Institute of Physics.