Precise Optical Metrology Using Computational Shear Interferometry and an LCD Monitor as Light Source
Precise Optical Metrology Using Computational Shear Interferometry and an LCD Monitor as Light Source
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使用计算剪切干涉测量法和 LCD 监视器作为光源的精确光学计量
DOI：
10.1007/978-3-642-36359-7_134
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发表时间：
2014
期刊：
影响因子：
--
通讯作者：
Bergmann
中科院分区：
文献类型：
--
作者：
Falldorf;C.Simic;Schulz;v. Kopylow;Bergmann
介绍了一种测量透明物体复透射率函数的相干光学测量技术。它是基于剪切干涉测量与对象的焦点和随后的数值处理。与现有的方法[1，2]相比，我们通过LCD监视器提供的具有有限时间相干性和周期性空间相干性的光来照射物体。该方法有潜力联合收割机的扩展光源的大数值孔径与干涉技术的精度相结合。此外，有限的时间相干性减少了由设置内的寄生反射的相干放大引起的系统测量误差。作为一个证明的原则，我们示出了一个定义的凹痕的平面的复杂的透射率的测量，并将它们与从斐索干涉仪获得的结果进行比较。
IntroductionWe present a coherent optical measurement technique to determine the complex transmittance function of a transparent object. It is based on shear interferometry with the object in focus and subsequent numerical processing. In contrast to existing approaches [1,2] we illuminate the object by light with limited temporal coherence and periodic spatial coherence provided by an LCD monitor. The method has the potential to combine the large numerical aperture of an extended light source with the accuracy associated with interferometric techniques. Furthermore, the limited temporal coherence reduces systematic measurement errors arising from coherent amplification of parasitic reflections within the setup. As a proof of principle we show measurements of the complex transmittance of a flat with a defined dent and compare them with results obtained from a Fizeau interferometer.