Demonstration of 12 nm Resolution Fresnel Zone Plate Lens based Soft X-ray Microscopy
Demonstration of 12 nm Resolution Fresnel Zone Plate Lens based Soft X-ray Microscopy
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DOI：
10.1364/oe.17.017669
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发表时间：
2009-09-28
期刊：
影响因子：
3.8
通讯作者：
Anderson, Erik H.
中科院分区：
文献类型：
--
作者：
Chao, Weilun;Kim, Jihoon;Anderson, Erik H.
为了将软 X 射线显微镜的分辨率扩展到 10 nm 或更高，我们开发了一种新的菲涅耳波带片透镜纳米制造工艺。基于双图案化技术的新工艺使我们能够制造具有 12 nm 外层的高质量金波带板。使用伯克利的全视场透射 X 射线显微镜 XM-1 对波带片进行的测试表明，该透镜可以清晰地解析 12 nm 的线和空间。这一结果代表着向 10 nm 及更高分辨率迈出了重要一步。 (C) 2009 美国光学学会
To extend soft x-ray microscopy to a resolution of order 10 nm or better, we developed a new nanofabrication process for Fresnel zone plate lenses. The new process, based on the double patterning technique, has enabled us to fabricate high quality gold zone plates with 12 nm outer zones. Testing of the zone plate with the full-field transmission x-ray microscope, XM-1, in Berkeley, showed that the lens clearly resolved 12 nm lines and spaces. This result represents a significant step towards 10 nm resolution and beyond. (C) 2009 Optical Society of America