Fabrication of microchannel with electrodes on side wall
Fabrication of microchannel with electrodes on side wall
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DOI：
10.1142/s0217979206041574
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发表时间：
2006-10-30
影响因子：
1.7
通讯作者：
Kim, G. M.
中科院分区：
文献类型：
--
作者：
Kang, G. H.;No, K. Y.;Kim, G. M.
提出了一种制作侧壁带有金属电极的微流控通道的新方法。三维电极图案通过荫罩沉积在高度凹陷的微通道表面上。采用聚合物成型技术制备了聚合物微通道。采用MEMS工艺制作了用于电极图形化的荫罩。电极图案化的侧壁上的微通道使用阴影效应发生在倾斜蒸发通过荫罩。期望在侧壁上彼此面对的电极基于阻抗变化在生物分析装置处提供更高的灵敏度。
A new method to fabricate microfluidic channel which has metal electrodes on side wall is presented. Three dimensional electrode patterns were deposited through the shadow mask on highly recessed surfaces of microchannel. Polymer microchannel was fabricated using polymer molding technique. Shadow mask for electrode patterning were fabricated using MEMS process. Electrodes were patterned on side wall of microchannel using shadow effects occurring at angled evaporation through shadow mask. The electrodes on side walls facing each other are expected to provide more sensitivity at bio-analysis devices based on impedance variation.