Use of laser beam diffraction for non-invasive characterisation of CdTe thin film growth structure
Use of laser beam diffraction for non-invasive characterisation of CdTe thin film growth structure
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DOI：
10.1016/j.procir.2015.08.077
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发表时间：
2015
期刊：
影响因子：
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通讯作者：
N. Goffin;F. Lisco;A. Simeone;Gianfranco Claudio;J. Tyrer;E. Woolley;J. Erkoyuncu
中科院分区：
文献类型：
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作者：
N. Goffin;F. Lisco;A. Simeone;Gianfranco Claudio;J. Tyrer;E. Woolley;J. Erkoyuncu
碲化镉（CdTe）薄膜的表征通常需要使用侵入性技术来识别其结构生长和检测沉积过程中发生的缺陷。结构生长和缺陷的存在会影响最终器件的性能。一个非侵入性的检测系统，碲化镉薄膜已被开发，以确定这种材料的结构特性，比较两种不同的沉积技术，近空间升华（CSS）和磁控溅射（MS）。该系统利用1 μm二极管激光器穿过CdTe层，产生可检测的衍射图案，使用图像处理技术进行表征，并使用基于神经网络的认知决策支持系统进行评估。结果被发现是一致的，与传统的显微技术（SEM和TEM）用于分析薄膜CdTe太阳能电池的形态和结构特性。
Characterisation of Cadmium Telluride (CdTe) thin films commonly requires the use of invasive techniques for the identification of their structural growth and the detection of defects which occur during the deposition process. Structural growth and the presence of defects can affect the performance of the final device. A non-invasive inspection system for CdTe films has been developed to identify the structural properties of this material, comparing two different deposition techniques, Close Space Sublimation (CSS) and Magnetron Sputtering (MS). The proposed system utilises a 1 μm diode laser which passes through the CdTe layer, originating detectable diffraction patterns, which are characterised using image processing techniques and assessed using a neural network-based cognitive decision-making support system. Results are found to be consistent with the conventional microscopic techniques (SEM and TEM) used to analyse morphological and structural properties of thin-film CdTe solar cells.