Enhancement of SAW laser probe measurements by signal processing
Enhancement of SAW laser probe measurements by signal processing
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通过信号处理增强 SAW 激光探头测量
DOI：
10.1109/ultsym.1999.849389
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发表时间：
1999
期刊：
影响因子：
--
通讯作者：
A. Rønnekleiv
中科院分区：
文献类型：
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作者：
H. Engan;A. Rønnekleiv
许多不同类型的SAW激光探针已被用于表征SAW器件以及特定材料的固有特性。我们的激光探头是一种改进的刀口型。它具有线性响应，具有高动态范围。探头提供了检测信号的全相量信息，并且检测过程的方向特性使得可以确定两个空间正交方向上的表面倾斜分量。我们首先总结了探头的基本特点。我们展示了几个例子，我们利用这些功能结合信号处理技术，如快速傅立叶变换。这使我们能够专注于被测器件的不同特性。因此，我们利用空间频率域，并在基本的检测过程中，wavecrest的方向，以提高特定属性的测量。实例包括从包含各种结构的组件的选择上的测量获得的结果。
Many different types of the SAW laser probe have been used for several years to characterize SAW devices as well as inherent properties of particular materials. Our laser probe is of a modified knife-edge type. Operating with a linear response, it has a high dynamic range. The probe provides full phasor information of the detected signal, and directional properties of the detection process makes it possible to determine the surface tilt components in two spatially orthogonal directions. We first sum up the basic characteristics of the probe. We show several examples where we take advantage of these features combined with signal processing techniques such as the fast Fourier transform. This enables us to concentrate on distinct properties of the devices under test. We thus exploit the spatial frequency domain and, in the basic detection process, the directions of the wavecrests, to enhance measurements of particular properties. Examples include results obtained from measurements on a selection of components containing various structures.